P‐140: High Bandwidth Glass‐Based Capacitive Micromachined Ultrasound Transducers (G‐CMUTs) for Medical Imaging Application

In this work, we have developed the glass‐based capacitive micromachined ultrasound transducers (G‐CMUTs). The sacrificial layer etching process flow employed for manufacturing of G‐CMUTs is reported. Specific has significant promise acoustic property with ~130 % bandwidth at ~8.2 MHz. Real time in‐vivo imaging capability demonstrates actual usability technology medical imaging.